MEMS
concept · 1970 · Digital age
Microelectromechanical systems — mechanics on a silicon chip.
Principles and materials it uses
- Silicon — is made of. MEMS are etched in silicon.
Where it is used
- Accelerometer — is used in. Modern accelerometers are MEMS devices.
- Gyroscope — is used in. Phones use MEMS gyroscopes.
- Microphone — is used in. Smartphone microphones are MEMS devices.
- DLP chip — is used in. MEMS mirrors.