EUV lithography and freezer: what they have in common
- Step 1. EUV lithography — has part — Mirror. Mirror optics (lenses absorb EUV).
- Step 2. Mirror — is part of — Vacuum flask. The silvering reflects heat radiation.
- Step 3. Vacuum flask — uses — Thermal insulation. Insulation.
- Step 4. Thermal insulation — is part of — Freezer. Polyurethane foam in the walls.