EUV lithography
concept · 2019 · Digital age
Photolithography in extreme ultraviolet for processes of a few nanometres.
What it is made of
- Mirror — has part. Mirror optics (lenses absorb EUV).
Principles and materials it uses
- Plasma — uses. The source is a tin plasma.
Where it is used
- Microprocessor — is used in. Leading-edge processors.
What it is a kind of
- Photolithography — is a kind of. Lithography.