Photolithography
concept · 1957 · Digital age
Transferring a circuit pattern onto silicon with light through a mask.
Principles and materials it uses
- Lens — uses. Projection optics.
Where it is used
- Integrated circuit — is used in. The circuit pattern is transferred by light.
History: what it evolved from and what it influenced
- Camera — evolved from. A photographic process carried over to silicon.
What it is a kind of
- EUV lithography — includes. Lithography.